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Automatic ultrasonic spraying equipment

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Category: Ultrasonic spraying

Changzhou Wellsin-Semi Equipment Co., Ltd. was established by an international talent team. Aiming at the wide application of ultrasonic technology and plasma technology in the semiconductor and microelectronics fields, it is committed to the development and sales of semiconductor-specific ultrasonic and plasma equipment, and cooperates with the Chinese Academy of Sciences, R&D cooperation with research institutes and other institutes to provide the industry with high-quality products and services.

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Product Details

Product introduction

Automatic ultrasonic spraying equipment is mainly used for photoresist spraying. Compared with spin coating, photoresist ultrasonic spraying saves the amount of photoresist used, and can realize the groove structure of the wafer and the 3D structure of MEMS. More uniform spraying.

Product details

Configuration table

XY axis travel	400mm
Z-axis travel	100mm
Motor	Servo
Motion accuracy	±0.02mm
Touch screen	Standard configuration
Infusion pump	Syringe pump, gear pump, plunger pump or pressure pump
Gas flow control	MFC mass flow meter
Illumination lights	White light or yellow light
Yellow light film	Optional
Auxiliary heating	Optional
Power input	220V
Overall power	2000W